HD Series
- 
                            Pumping Speed
                            
- 120 ~ 9,000 ㎥/hr
 - 2,000 ~ 150,000 LPM
 
 - 
                            Ultimate Pressure
                            
- ≤ 3.0 x 10-2 ~ 5.0 x 10-1 Torr
 - ≤ 3.9 x 10+0 ~ 6.6 x 10-1 Pa
 
 
RD Series
- 
                            Pumping Speed
                            
- 190 ~ 3,600 ㎥/hr
 - 3,100 ~ 60,000 LPM
 
 - 
                            Ultimate Pressure
                            
- ≤ 8.0 x 10-3 ~ 5.0 x 10-3
 - ≤ 1.0 x 10+0 ~ 6.6 x 10-1
 
 
					
				
				
        
        
        
            
        
        
                        
                        