Flat-panel display technology is continuously evolving to its new shape.

RGB OLED deposition is an example, an effective process will result in high-quality resolution products. Reliable Dry vacuum pump will
provide support creating an environment for needed innovation in display technology.

HD Series

• 

Product Details +

• Pumping Speed
  • 120 ~ 9,000 ㎥/hr
  • 2,000 ~ 150,000 LPM
• Ultimate Pressure
  • ≤ 3.0 x 10-2 ~ 5.0 x 10-1 Torr
  • ≤ 3.9 x 10+0 ~ 6.6 x 10-1 Pa

RD Series

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Product Details +

• Pumping Speed
  • 190 ~ 3,600 ㎥/hr
  • 3,100 ~ 60,000 LPM
• Ultimate Pressure
  • ≤ 8.0 x 10-3 ~ 5.0 x 10-3
  • ≤ 1.0 x 10+0 ~ 6.6 x 10-1