HD Series
-
Pumping Speed
- 120 ~ 9,000 ㎥/hr
- 2,000 ~ 150,000 LPM
-
Ultimate Pressure
- ≤ 3.0 x 10-2 ~ 5.0 x 10-1 Torr
- ≤ 3.9 x 10+0 ~ 6.6 x 10-1 Pa
RD Series
-
Pumping Speed
- 190 ~ 3,600 ㎥/hr
- 3,100 ~ 60,000 LPM
-
Ultimate Pressure
- ≤ 8.0 x 10-3 ~ 5.0 x 10-3
- ≤ 1.0 x 10+0 ~ 6.6 x 10-1
